High-resolution pattern formation featuring excellent dimension correlation by enhanced wettability development technology

Shigeki Shimomura; Hisayuki Shimada; Rita Au; Mamoru Miyawaki; Tadahiro Ohmi

doi:10.1117/12.154796

15 September 1993 High-resolution pattern formation featuring excellent dimension correlation by enhanced wettability development technology

Shigeki Shimomura, Hisayuki Shimada, Rita Au, Mamoru Miyawaki, Tadahiro Ohmi

Author Affiliations +

Proceedings Volume 1925, Advances in Resist Technology and Processing X; (1993) https://doi.org/10.1117/12.154796
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

We have demonstrated that the addition of surfactant to developer results in (1) the resolution of the contact holes as small as 0.30 micrometers with good dimension correlation, (2) an increase in the depth of focus at the minimum feature size, and (3) a reduction in the exposure energy needed to form fine patterns. The surfactant enhances the wettability of the developer to the photoresist, thus promoting dissolution of the photoresist, especially in narrow spaces such as contact holes. The optimal surfactant concentration in the developer performs superior development characteristics. In addition, we also demonstrate the effect of the molecular structure of surfactant on development performance.

Citation Download Citation

Shigeki Shimomura, Hisayuki Shimada, Rita Au, Mamoru Miyawaki, and Tadahiro Ohmi "High-resolution pattern formation featuring excellent dimension correlation by enhanced wettability development technology", Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); https://doi.org/10.1117/12.154796

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available