Role of surface tension in silylation processes

Andre P. Weill; Patrick Jean Paniez; Olivier P. Joubert; Francoise Debaene; Daniel Sage; Gilles R. Amblard; Michel J. Pons

doi:10.1117/12.154759

15 September 1993 Role of surface tension in silylation processes

Andre P. Weill, Patrick Jean Paniez, Olivier P. Joubert, Francoise Debaene, Daniel Sage, Gilles R. Amblard, Michel J. Pons

Author Affiliations +

Proceedings Volume 1925, Advances in Resist Technology and Processing X; (1993) https://doi.org/10.1117/12.154759
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

The DESIRE^R process has been proposed as an attractive solution to lithographic problems, combining the performance of multilayer systems to the simplicity of monolayer processes. Despite the large number of studies devoted to this type of process, the various mechanisms involved during the silylation and dry development steps are not yet totally understood. The first part of the paper deals with the changes in solubility of the resist layer before and after silylation and suggests that the polarity of the resist is modified during the process. Surface tension measurements are then reported in order to quantitatively evaluate the changes in polarity of the silylated resist. Finally it is shown that the work of adhesion between silylated and non-silylated material can easily explain both the stability of the silylated islands during the HMDS process and the motion of these silylated areas during the dry development step.

Citation Download Citation

Andre P. Weill, Patrick Jean Paniez, Olivier P. Joubert, Francoise Debaene, Daniel Sage, Gilles R. Amblard, and Michel J. Pons "Role of surface tension in silylation processes", Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); https://doi.org/10.1117/12.154759

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available