4 August 1993 Obtaining process information from defect detection data to focus defect reduction programs in the fab environment
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Abstract
This paper presents an in-line monitoring scheme and zone partitioning experiment. An automated laser based wafer inspection system, linked with a defect data management station was integrated into the fab process flow as part of a defect reduction strategy. The results emphasize the feasibility of such a strategy as well as the ease of integration once such a strategy is established.
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Patricia Gabella, Patricia Gabella, Elizabeth A. Knowles, Elizabeth A. Knowles, } "Obtaining process information from defect detection data to focus defect reduction programs in the fab environment", Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); doi: 10.1117/12.148986; https://doi.org/10.1117/12.148986
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