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4 August 1993 Phase image metrology with a modified coherence probe microscope
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Abstract
Bright field optical microscopy has well-known nonlinearity problems due to varying film thickness. Phase images eliminate many of these problems. This paper will describe the advantages of phase imaging, based on calculated results. Experimental corroboration has been obtained with a bimodal coherence probe microscope. In the less coherent mode, the microscope utilizes illumination with a high numerical aperture and broad spectral bandwidth. In the coherent mode, the illumination is monochromatic and has a low numerical aperture. Experimental data will be presented and compared to theoretical results. The system demonstrates extended resolution for some materials and a reduced sensitivity to substrate variations.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Diana Nyyssonen, Joel L. Seligson, and Isaac Mazor "Phase image metrology with a modified coherence probe microscope", Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); https://doi.org/10.1117/12.149020
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