4 August 1993 Precise reticle defect classification and sizing based on double-tier inspection technique
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Abstract
A new scheme for automatic defect classification and sizing is presented. The new scheme is developed for improving the overall production of automatic die-to-database reticle inspection equipment for defect detection. The new scheme replaces the time-consuming, inaccurate and non-repeatable traditional methods that are based on human reviewing and verification of defects with the aid of relatively crude image processing electronics. In order to overcome these limitations, a double-tier scheme has been developed for automatic defect classification and sizing (ADCS). The fundamentals of this scheme are presented. The image processing algorithms are described and their overall performance is evaluated using various test and production masks. The reported scheme represents a practical precise and accurate method for automatic classification and sizing.
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Yair Eran, Yair Eran, Shiree Shafrir, Shiree Shafrir, Ido Weinberg, Ido Weinberg, Nissim Almaliach, Nissim Almaliach, Meir Aloni, Meir Aloni, Saeed Sabouri, Saeed Sabouri, } "Precise reticle defect classification and sizing based on double-tier inspection technique", Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); doi: 10.1117/12.148993; https://doi.org/10.1117/12.148993
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