8 August 1993 Computer-aided phase-shift mask design with reduced complexity
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Abstract
We propose a new approach to systematic phase shift mask design. In doing so, we constrain the complexity of the mask at a pre-specified level by limiting the number of `features' on the mask. We then optimize the location, size, and phase of the features so as to achieve a desired intensity pattern on the wafer. The main advantage of this object-oriented approach over our previous pixel-based solution is that it results in substantially larger assisting phase shift features, and is therefore easier to fabricate. Our approach can also be used to design masks with proper bias and/or extension of the depth of focus. We show examples of contact hole, bright line, and chromeless line-space mask designs.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yong Liu, Yong Liu, Avideh Zakhor, Avideh Zakhor, } "Computer-aided phase-shift mask design with reduced complexity", Proc. SPIE 1927, Optical/Laser Microlithography, (8 August 1993); doi: 10.1117/12.150445; https://doi.org/10.1117/12.150445
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