8 August 1993 KrF excimer lasers for DUV-lithography
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Abstract
The paper presents the features of the Lambda Physik 248 LEX KrF DUV-Lithography laser for spectral performance, reliability, and system integration. The 248 LEX is based on Lambda Physik's series of `LAMBDA' industrial lasers. Data of 5 years field experience with the LAMBDA high power industrial lasers are used to discuss reliability of the laser in and economic aspects of the laser application in terms of cost-of-ownership. Results of an endurance test program for lithography lasers are used to given an outlook on system performance and component lifetime. Based on these data the cost-of-ownership is projected for the coming years and multiple system installations. An update of Lambda Physiks' R&D effort and recent progress is given.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rainer Paetzel, Rainer Paetzel, Hermann Buecher, Hermann Buecher, Ulrich Rebhan, Ulrich Rebhan, } "KrF excimer lasers for DUV-lithography", Proc. SPIE 1927, Optical/Laser Microlithography, (8 August 1993); doi: 10.1117/12.150468; https://doi.org/10.1117/12.150468
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