Simulating the stitching performance of flat-panel-display steppers

Roger C. Sumner; David S. Holbrook

doi:10.1117/12.150450

8 August 1993 Simulating the stitching performance of flat-panel-display steppers

Roger C. Sumner, David S. Holbrook

Proceedings Volume 1927, Optical/Laser Microlithography; (1993) https://doi.org/10.1117/12.150450
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

There are four major imaging issues when using a flat panel display (FPD) stepper: stitching, overlay, CD control, and the variation in CDs across stitching boundaries (CD stitching or CD continuity). Simulations have been performed in an effort to analyze the performance of FPD steppers, and a comparison is made between the performance criteria of FPD steppers and IC steppers.

Citation Download Citation

Roger C. Sumner and David S. Holbrook "Simulating the stitching performance of flat-panel-display steppers", Proc. SPIE 1927, Optical/Laser Microlithography, (8 August 1993); https://doi.org/10.1117/12.150450

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