8 August 1993 Simulating the stitching performance of flat-panel-display steppers
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There are four major imaging issues when using a flat panel display (FPD) stepper: stitching, overlay, CD control, and the variation in CDs across stitching boundaries (CD stitching or CD continuity). Simulations have been performed in an effort to analyze the performance of FPD steppers, and a comparison is made between the performance criteria of FPD steppers and IC steppers.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roger C. Sumner, Roger C. Sumner, David S. Holbrook, David S. Holbrook, } "Simulating the stitching performance of flat-panel-display steppers", Proc. SPIE 1927, Optical/Laser Microlithography, (8 August 1993); doi: 10.1117/12.150450; https://doi.org/10.1117/12.150450

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