8 August 1993 Stability of krypton fluoride laser in real stepper mode operation
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Abstract
The stable performance of the line-narrowed Krypton Fluoride Excimer Laser for production steppers, the KLES-G6, in real stepper mode operation is presented. Wavelength stability of < +/- 0.1 pm and pulse-to-pulse energy stability of < 2% ((sigma) ) were achieved in the real stepper mode operation. Further the durability test was made at 6 W(10 mJ, 600 Hz) in 1 sec. ON - 1 sec. OFF (50%) burst mode and in cw mode. The central wavelength stability < +/- 0.2 pm including the drift at the head of burst, spectral bandwidth < 1.5 pm, and pulse-to-pulse energy stability < 2.5% ((sigma) ) over 1.6 X 109 shots were achieved. The KLES-G6 will assist us to utilize the excimer stepper in real commercial production successfully.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Masahiko Kowaka, Masahiko Kowaka, Yukio Kobayashi, Yukio Kobayashi, Osamu Wakabayashi, Osamu Wakabayashi, Noritoshi Ito, Noritoshi Ito, Junichi Fujimoto, Junichi Fujimoto, Takanobu Ishihara, Takanobu Ishihara, Hiroaki Nakarai, Hiroaki Nakarai, Hakaru Mizoguchi, Hakaru Mizoguchi, Yoshiho Amada, Yoshiho Amada, Yasuhiro Nozue, Yasuhiro Nozue, } "Stability of krypton fluoride laser in real stepper mode operation", Proc. SPIE 1927, Optical/Laser Microlithography, (8 August 1993); doi: 10.1117/12.150429; https://doi.org/10.1117/12.150429
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