Reflection of soft X rays from quasi-periodic multilayer films

Nian-Hua Liu; Wei Guo Feng; Xiang Wu

doi:10.1117/12.155785

10 September 1993 Reflection of soft X rays from quasi-periodic multilayer films

Nian-Hua Liu, Wei Guo Feng, Xiang Wu

Proceedings Volume 1928, International Symposium on Laser-Plasma Interactions; (1993) https://doi.org/10.1117/12.155785
Event: Laser-Plasma Interactions: the International Symposium, 1992, Shanghai, China

Abstract

A quasi-periodic design method for soft x-ray multilayer reflector to achieve high reflectivity and low loss is presented. The dependence of the reflectivity on the optical constants of the absorbing layers for a given substrate and spacer materials is investigated, and the criterion of choosing optical components is also discussed. We find that when the extinction coefficient of the absorber is large, the reflectivity of the multilayer reflector is governed by the difference of the extinction coefficients of the components. In order to obtain high reflectivity in the case of large extinction coefficient, one should choose a pair of materials with large difference of extinction coefficients.

Citation Download Citation

Nian-Hua Liu, Wei Guo Feng, and Xiang Wu "Reflection of soft X rays from quasi-periodic multilayer films", Proc. SPIE 1928, International Symposium on Laser-Plasma Interactions, (10 September 1993); https://doi.org/10.1117/12.155785

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