14 December 1992 Design of high-to bolometers on silicon membranes for a far infrared imaging array
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Proceedings Volume 1929, 17th International Conference on Infrared and Millimeter Waves; 19292S (1992) https://doi.org/10.1117/12.2298217
Event: 17th International Conference on Infrared and Millimeter Waves, 1992, Pasadena, CA, United States
Abstract
We discuss the design of high-T, superconducting bolometers for use in a far infrared imaging array from wave- lengths 30 - 100 pm. Useful opportunities exist for imaging and spectroscopy with bolometer arrays made on micro-machined silicon membranes.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Verghese, "Design of high-to bolometers on silicon membranes for a far infrared imaging array", Proc. SPIE 1929, 17th International Conference on Infrared and Millimeter Waves, 19292S (14 December 1992); doi: 10.1117/12.2298217; https://doi.org/10.1117/12.2298217
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