The kinetic model of proton exchange in LiNbO3, LiTaO3 crystals is proposed. The model is based on the formalism of relative composing units, which enables the user to find the expressions for gradients of chemical potentials of diffused particles in the sublatticies of sites and intersites. The diffusion equations for hydrogen, lithium, and vacancies in sites are obtained. Their solutions with some values of self-diffusion coefficients allow us, for the first time, to explain the step-like concentration profile of hydrogen, the upper limit of its concentration, the asymmetry of hydrogen and lithium depth-distributions, and some other specific features of proton exchange process.
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