10 September 1993 Laser metrology gauges for OSI
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Proceedings Volume 1947, Spaceborne Interferometry; (1993); doi: 10.1117/12.155740
Event: Optical Engineering and Photonics in Aerospace Sensing, 1993, Orlando, FL, United States
Abstract
Heterodyne interferometers have been commercially available for many years. In addition, many versions have been built at JPL for various projects. This activity is aimed at improving the accuracy of such interferometers from the 1 - 30 nanometer level to the picometer level for use in the proposed OSI and SONATA missions as metrology gauges. In the null-gauge configuration, we obtained a precision of 0.6 picometers at time scales of 2,500 seconds. In the relative-gauge configuration, we obtained an accuracy of 3.5 picometers rms in vacuum at time scales of few minutes. As absolute gauge with an accuracy of 10 microns over a distance of 10 meters in under construction.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yekta Gursel, "Laser metrology gauges for OSI", Proc. SPIE 1947, Spaceborne Interferometry, (10 September 1993); doi: 10.1117/12.155740; https://doi.org/10.1117/12.155740
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KEYWORDS
Interferometers

Metrology

Heterodyning

Polarization

Beam splitters

Distance measurement

Interferometry

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