15 November 1993 Specialized CCDs for high-frame-rate visible imaging and UV imaging applications
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This paper reports recent progress by the authors in two distinct charge coupled device (CCD) technology areas. The first technology area is high frame rate, multi-port, frame transfer imagers. A 16-port, 512 X 512, split frame transfer imager and a 32-port, 1024 X 1024, split frame transfer imager are described. The thinned, backside illuminated devices feature on-chip correlated double sampling, buried blooming drains, and a room temperature dark current of less than 50 pA/cm2, without surface accumulation. The second technology area is vacuum ultraviolet (UV) frame transfer imagers. A developmental 1024 X 640 frame transfer imager with 20% quantum efficiency at 140 nm is described. The device is fabricated in a p-channel CCD process, thinned for backside illumination, and utilizes special packaging to achieve stable UV response.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter A. Levine, Peter A. Levine, Gordon Charles Taylor, Gordon Charles Taylor, Frank V. Shallcross, Frank V. Shallcross, John R. Tower, John R. Tower, William B. Lawler, William B. Lawler, Lorna J. Harrison, Lorna J. Harrison, Dennis George Socker, Dennis George Socker, Mike Marchywka, Mike Marchywka, "Specialized CCDs for high-frame-rate visible imaging and UV imaging applications", Proc. SPIE 1952, Surveillance Technologies and Imaging Components, (15 November 1993); doi: 10.1117/12.161422; https://doi.org/10.1117/12.161422


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