15 November 1993 Specialized CCDs for high-frame-rate visible imaging and UV imaging applications
Author Affiliations +
Abstract
This paper reports recent progress by the authors in two distinct charge coupled device (CCD) technology areas. The first technology area is high frame rate, multi-port, frame transfer imagers. A 16-port, 512 X 512, split frame transfer imager and a 32-port, 1024 X 1024, split frame transfer imager are described. The thinned, backside illuminated devices feature on-chip correlated double sampling, buried blooming drains, and a room temperature dark current of less than 50 pA/cm2, without surface accumulation. The second technology area is vacuum ultraviolet (UV) frame transfer imagers. A developmental 1024 X 640 frame transfer imager with 20% quantum efficiency at 140 nm is described. The device is fabricated in a p-channel CCD process, thinned for backside illumination, and utilizes special packaging to achieve stable UV response.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter A. Levine, Peter A. Levine, Gordon Charles Taylor, Gordon Charles Taylor, Frank V. Shallcross, Frank V. Shallcross, John R. Tower, John R. Tower, William B. Lawler, William B. Lawler, Lorna J. Harrison, Lorna J. Harrison, Dennis George Socker, Dennis George Socker, Mike Marchywka, Mike Marchywka, "Specialized CCDs for high-frame-rate visible imaging and UV imaging applications", Proc. SPIE 1952, Surveillance Technologies and Imaging Components, (15 November 1993); doi: 10.1117/12.161422; https://doi.org/10.1117/12.161422
PROCEEDINGS
16 PAGES


SHARE
RELATED CONTENT

High speed pn CCDs as imaging detectors from 200 to...
Proceedings of SPIE (August 15 2000)
An Advanced Radial Camera For The Hubble Space Telescope
Proceedings of SPIE (April 30 1986)
Radiation concerns for the Solar-A soft x-ray telescope
Proceedings of SPIE (June 30 1991)
Bump-bonded back-illuminated CCDs
Proceedings of SPIE (August 11 1992)
Performance tests of large CCDs
Proceedings of SPIE (June 30 1991)
Development Of Large CCD Arrays With Enhanced UV Performance
Proceedings of SPIE (December 27 1989)

Back to Top