31 August 1993 Thin-film monolithic detector arrays for uncooled thermal imaging
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Abstract
This paper discusses the design and development of thin film monolithic thermal infrared detector arrays integrated with signal conditioning and multiplexor VLSI microcircuits on the same silicon chip. The impact of this technology on thermal imager design is considered. Monolithic processing offers the potential for reducing detector cost to that of a microelectronic circuit component, thus opening the way for development of a new generation of lightweight, affordable thermal imagers. A summary is given of the status of uncooled thermal sensor development at the Defence Science and Technology Organisation.
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Kevin Charles Liddiard, Kevin Charles Liddiard, } "Thin-film monolithic detector arrays for uncooled thermal imaging", Proc. SPIE 1969, Infrared Imaging Systems: Design, Analysis, Modeling, and Testing IV, (31 August 1993); doi: 10.1117/12.154733; https://doi.org/10.1117/12.154733
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