13 August 1993 Optimized polishing of optical surfaces
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Abstract
For laser applications very smooth surfaces are required more frequently. High power systems need components, such as cavity mirrors and lenses for beam forming and focussing, with extremely high laser damage threshold. In low power systems for metrology any light scattering originating from a relatively high surface roughness results in measuring errors. In both cases flat and curved surfaces with very low micro-roughness rms values close to 1 nm or even less have to be produced. This requires the optimization of the polishing process. Minimized surface roughness and light scattering are shown as results of this optimization.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rainer G. Schuhmann, Michael Schulz-Grosser, Dieter Froelich, "Optimized polishing of optical surfaces", Proc. SPIE 1971, 8th Meeting on Optical Engineering in Israel: Optical Engineering and Remote Sensing, (13 August 1993); doi: 10.1117/12.151004; https://doi.org/10.1117/12.151004
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