18 November 1993 Precision components for optical fiber connections fabricated by the LIGA process
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Proceedings Volume 1973, Passive Fiber Optic Components and Their Reliability; (1993) https://doi.org/10.1117/12.163763
Event: Video Communications and Fiber Optic Networks, 1993, Berlin, Germany
Abstract
The LIGA process is a new technology for the fabrication of precisely shaped polymer or metal structures. Using x-ray lithography, electroforming and micromolding as basic technologies, an accuracy in the submicron range can be achieved. For applications in fiber to fiber or fiber to chip coupling technology, mechanical structures with an accuracy of down to 0.3 micrometers have been realized and investigated using different techniques and materials. Additionally, passive waveguide components for optical fiber networks have been fabricated by molding techniques in polymer materials. These components show a low insertion loss, a well defined power splitting ratio and a compact device geometry.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arnd Rogner "Precision components for optical fiber connections fabricated by the LIGA process", Proc. SPIE 1973, Passive Fiber Optic Components and Their Reliability, (18 November 1993); doi: 10.1117/12.163763; https://doi.org/10.1117/12.163763
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