3 September 1993 Heterodyne holographic method of data acquisition on thickness variation of transparent plates and films
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Proceedings Volume 1978, Coherent Measuring and Data Processing Methods and Devices; (1993) https://doi.org/10.1117/12.155040
Event: Coherent Measuring and Data Processing Methods and Devices: Selected Papers, 1993, Bellingham, WA, United States
Abstract
The holographic method to control transparent plate and film thickness variations by heterodyne measurement of the phase of transversed coherent light is theoretically and experimentally analyzed. It provides very high accuracy (about 1 nm) of the thickness variations measurements in visible range.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. I. Krupitsky, S. V. Morosov, Tatyana N. Sergeenko, "Heterodyne holographic method of data acquisition on thickness variation of transparent plates and films", Proc. SPIE 1978, Coherent Measuring and Data Processing Methods and Devices, (3 September 1993); doi: 10.1117/12.155040; https://doi.org/10.1117/12.155040
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