11 May 1993 Laser automatic thick-film element photoetching system
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Proceedings Volume 1979, 1992 International Conference on Lasers and Optoelectronics; (1993) https://doi.org/10.1117/12.144171
Event: 1992 International Conference on Lasers and Optoelectronics, 1992, Bejing, China
Abstract
By using micro-computer controlled stepmotor, we made the laser beam scan in accordance with the pattern of the thick-film element, and measured its resistance at the same time. The resistance value precision can reach 10-4.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tao-Lue Chen, Qirong Lu, Shaohe Chen, Ximing Deng, "Laser automatic thick-film element photoetching system", Proc. SPIE 1979, 1992 International Conference on Lasers and Optoelectronics, (11 May 1993); doi: 10.1117/12.144171; https://doi.org/10.1117/12.144171
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