Paper
24 January 1980 Laser Chemical Vapor Deposition Of Titanium Carbide
J. Mazumder, S. D. Allen
Author Affiliations +
Abstract
The chemical vapor deposition of titanium carbide using a 1.4 KW CO2 laser as the heat source is examined. The relationship between the laser power density and traverse speed on deposit thickness and properties is described. The laser chemical vapor deposited carbide coating is characterized by SEM, EDAX, optical microscopy and microhardness tests. Hardness up to 2800 Knoop is observed leading to the possibility of extremely wear resistant surface coatings. Advantages such as controllability of input energy and small heat affected zone resulting in little or minimum distortion open the door to a wide variety of selected area chemical vapor deposition processes.
© (1980) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Mazumder and S. D. Allen "Laser Chemical Vapor Deposition Of Titanium Carbide", Proc. SPIE 0198, Laser Applications in Materials Processing, (24 January 1980); https://doi.org/10.1117/12.958023
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CITATIONS
Cited by 8 scholarly publications.
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KEYWORDS
Chemical vapor deposition

Toxic industrial chemicals

Titanium

Chemical lasers

Coating

Quartz

Optical microscopy

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