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1 April 1993 Image sensor used in displacement measuring with high resolution
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Proceedings Volume 1982, Photoelectronic Detection and Imaging: Technology and Applications '93; (1993) https://doi.org/10.1117/12.142031
Event: Photoelectronic Detection and Imaging: Technology and Applications '93, 1993, Beijing, China
Abstract
A kind of specially designed MOS image sensor (IS) with high sensitivity is introduced in the paper. The IS is used to receive moire signals to form a phase-modulated signal. With dynamic phase discriminating and subdivision, a very high resolution and precision can be achieved. This special image sensor is valuable in practical designing of high resolution (<EQ 0.1 micrometers ), high precision, and low cost grating displacement transducer.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xianghui Yuan, Guolin Lu, and Tingchao Zhao "Image sensor used in displacement measuring with high resolution", Proc. SPIE 1982, Photoelectronic Detection and Imaging: Technology and Applications '93, (1 April 1993); https://doi.org/10.1117/12.142031
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