Scanning laser microscopy and laser thermal imaging

Guanqi Yue; Yungang Nie

doi:10.1117/12.142076

1 April 1993 Scanning laser microscopy and laser thermal imaging

Guanqi Yue, Yungang Nie

Proceedings Volume 1982, Photoelectronic Detection and Imaging: Technology and Applications '93; (1993) https://doi.org/10.1117/12.142076
Event: Photoelectronic Detection and Imaging: Technology and Applications '93, 1993, Beijing, China

Abstract

Besides some advantages over conventional optical microscopes, a scanning laser imaging system is the basis of developing another kind of imaging system i.e., a laser-thermal imaging system. The latter provides thermal images reflecting distribution of thermal properties, such as thermal conductivity of the sample, thus it makes imaging of some material parameters other than optical properties possible. Principle and structure of such a laser-thermal imaging system is described and images of ion implantation dose density in crystal obtained from this system are given.

Citation Download Citation

Guanqi Yue and Yungang Nie "Scanning laser microscopy and laser thermal imaging", Proc. SPIE 1982, Photoelectronic Detection and Imaging: Technology and Applications '93, (1 April 1993); https://doi.org/10.1117/12.142076

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