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This paper investigates image forming properties of the Bessel Beam (Jo ( ar)) and the Absolute-Bessel Beam (!Jo (a r) I) for an aberrated(/aberration-free) optical system. Whilst the Bessel Beam acts as combined filter of ,amplitude and phase(CFAP), the Absolute-Bessel Beam behaves as an amplitude filter only. The Bessel Beam shows superb compensating effect for an optical system with spherical aberration and represents the gain, G is 1.605. This result can therefore be applied to fabrication of semiconductor device.
S. J. Park
"Image-forming property of Bessel beam and absolute-Bessel beam", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 19831P (26 July 1993); https://doi.org/10.1117/12.2308480
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S. J. Park, "Image-forming property of Bessel beam and absolute-Bessel beam," Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 19831P (26 July 1993); https://doi.org/10.1117/12.2308480