26 July 1993 Dielectric and metal coatings for excimer laser optics
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 198332 (1993) https://doi.org/10.1117/12.2308529
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
The investigation and development of excimer laser for UV spectrum region, usage of their radiation for different practical purposes are defined considerably by the beam damage threshold of optical elements used. This concerns optics of ArF- and KrF-lasers operating at X = 193 nm and 248 nm, respectively. Pulse form of radiation of ArF- and KrF-lasers was close to right-angled with duration ofi 60 and 80 ns and generation energy of 4 and 10 J, respectively. At tepting in an open air the area of a spot irradiated was 5 mm . As regards directly the laser chamber, the area irradiated was 20 cm . In the last case, dielectric mirrors for ArF-lasers have damage thresholds which are by average 20% as low as in an open air. This can explained by the essential increase of irradiated area in which, apparently, there are defective sections as well as additional mirror irradiation by x-ray radiation and the effect of gaseous fluorine-containing medium. For silica windows these factors considerably reduce durability of antireflecting coatings; for MgF2 and CaF2 one has less problems.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
N. V. Morozov, N. V. Morozov, } "Dielectric and metal coatings for excimer laser optics", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 198332 (26 July 1993); doi: 10.1117/12.2308529; https://doi.org/10.1117/12.2308529
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