26 July 1993 Optical diagnostics of slightly rough surfaces
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 198339 (1993) https://doi.org/10.1117/12.2308536
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
Optical correlation methods for diagnostics of slightly rough surfaces are proposed, which are based on the model of an infinitely extended random phase object. All spatial frequency components associated with the phase structure of the object are assumed to contribute to formation of the radiation field resulting from interaction with the object. The object phase dispersion is assumed to be less than unity, and the inhomogeneity correlation radius of the random phase object larger than the incident wavelength.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
O. V. Angelsky, "Optical diagnostics of slightly rough surfaces", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 198339 (26 July 1993); doi: 10.1117/12.2308536; https://doi.org/10.1117/12.2308536
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