26 July 1993 Micro shape and rough surface analysis by fringe projection
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 19833H (1993) https://doi.org/10.1117/12.2308544
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
A new microscopic fringe projection system is described. Projection of the grating and imaging of the fringes is accomplished by the same objective. The spectrum of the binary grating is spatially filtered and projected into the aperture with a lateral shift. This leads to telecentric projection and imaging under oblique incidence. Topo- graphies of specularely as well as diffusely reflecting surfaces can be obtained. The measurement of rough, technical surfaces is demonstrated.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Klaus Leonhardt, "Micro shape and rough surface analysis by fringe projection", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 19833H (26 July 1993); doi: 10.1117/12.2308544; https://doi.org/10.1117/12.2308544
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