26 July 1993 Formation of optical disk direction paths and optical master disks with the help of inorganic resist
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 19835B (1993) https://doi.org/10.1117/12.2308610
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
Lightsensitivity of vacuum evaporated layers of chalcogenide vitreous semiconductors(ChVS) is determined by the photostructural transformations, that lead to solubility of exposed films in selective etchants. Such layers are rather perspective for recording of the holographic optical elements, kinoforms and for the laser lithography.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
I. Z. Indutny, I. Z. Indutny, } "Formation of optical disk direction paths and optical master disks with the help of inorganic resist", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 19835B (26 July 1993); doi: 10.1117/12.2308610; https://doi.org/10.1117/12.2308610
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