23 July 1993 Matrix eigenvalue method for anisotropic dielectric gratings
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 198371 (1993) https://doi.org/10.1117/12.2308672
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
We present a theoretical approach for diffraction of light from highly conducting wire gratings of arbitrary cross section. The approach, based on the surface impedance boundary condition, is used to reconstruct the shape of the wires from measurements of the transmitted zeroth order efficiency as a function of wavelength. The experimental curves (S polarization) obtained in the resonance region for galvanically deposited gold gratings, are fitted to the theory by assuming that the cross section of the wires is trapezoidal. The reliability of the results is studied by comparing theoretical and measured efficiencies for P polarization. The method is used to control the shape of the wires of x-ray transmission gratings.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jiro Yamakita, "Matrix eigenvalue method for anisotropic dielectric gratings", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 198371 (23 July 1993); doi: 10.1117/12.2308672; https://doi.org/10.1117/12.2308672
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