23 July 1993 Phase-shifting techniques in an interferometer with an externally pumped phase-conjugate mirror
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 198385 (1993) https://doi.org/10.1117/12.2308712
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
In practice, form deviations of technical surfaces lie within the micro- and submicrometer range. They often exhibit a micro structure of over 100 cycles/mm. Thus an interference microscope with an interference increment within the micrometer range is required for measuring the micro structure. An object field of 5 mm x 5 mm is usually necessary for a complete examination. Prism inferometry offers a favourable and practicable solution.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sabine Ludwig, "Phase-shifting techniques in an interferometer with an externally pumped phase-conjugate mirror", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 198385 (23 July 1993); doi: 10.1117/12.2308712; https://doi.org/10.1117/12.2308712
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