23 July 1993 A method of eliminating the measurement error for phase shifting interferometry
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 198388 (1993) https://doi.org/10.1117/12.2308715
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
A new idea to evaluate and to record shearing interferograms is presented. Only one interferogram is needed to gain the full information about the wave aberration. Optimization techniques are used for phase retrieval .
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chong Liu, "A method of eliminating the measurement error for phase shifting interferometry", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 198388 (23 July 1993); doi: 10.1117/12.2308715; https://doi.org/10.1117/12.2308715
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