23 July 1993 Multiple-beam interferometry by using near-grazing condition
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 19838B (1993) https://doi.org/10.1117/12.2308718
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
As we have pointed out in some earlier publications /1,2/ reference phase errors cause measuring errors in phase shifting interferometry being proportional to terms with cos24 and sin2(1), where 1 is the gross phase of the test sample. In /1/ it has been shown that linear reference phase errors cancel, which are typical for miscalibrations or drifts of the interferometer during the intake of the data necessary for an evaluation, if two sets of intensity values out of phase by 2are merged together in the following form:
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Pedraza-Contreras, "Multiple-beam interferometry by using near-grazing condition", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 19838B (23 July 1993); doi: 10.1117/12.2308718; https://doi.org/10.1117/12.2308718
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