23 July 1993 Compact phase shifting interferometer for optical shop testing
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 19838N (1993) https://doi.org/10.1117/12.2308730
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
A modular two-frequency laser interferometer system has been developed for position measurement. The two- frequency design of the interferometer, based on a highly stable Zeeman laser head provides great measurement range, stability, low sensitivity to noise and a resolution up to 0.01 gm.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Vogel, A. Vogel, } "Compact phase shifting interferometer for optical shop testing", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 19838N (23 July 1993); doi: 10.1117/12.2308730; https://doi.org/10.1117/12.2308730
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