23 July 1993 Two-frequency laser interferometer for position measurement
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 19838O (1993) https://doi.org/10.1117/12.2308731
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
A common path heterodyne interferometer with a modified lens is discussed. The measurement beam is focused on the surface by the modified lens and the phase is related to the surface height of focus spot. The reference beam go through the hole on the modified lens and strike coaxially to the first beam on the surface as a bigger spot. The phase difference between the beams? is proportional to height difference between the focal spot and weighed average of the heights within the illuminated area.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arpad Kiss, Arpad Kiss, } "Two-frequency laser interferometer for position measurement", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 19838O (23 July 1993); doi: 10.1117/12.2308731; https://doi.org/10.1117/12.2308731
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