Simple graphical method for single layer ellipsometry data analysis

Salvador Bosch

doi:10.1117/12.2308743

23 July 1993 Simple graphical method for single layer ellipsometry data analysis

Salvador Bosch

Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 198390 (1993) https://doi.org/10.1117/12.2308743
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

We present and discuss a Fabry-Perot type interferometric method that permits the concurrent measurement of the thermooptic coefficients of quartz retardation plates in the thermal range 25Ã‚Â°-300 Ã‚Â°C.

Citation Download Citation

Salvador Bosch "Simple graphical method for single layer ellipsometry data analysis", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 198390 (23 July 1993); https://doi.org/10.1117/12.2308743

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