23 July 1993 Simple graphical method for single layer ellipsometry data analysis
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 198390 (1993) https://doi.org/10.1117/12.2308743
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
We present and discuss a Fabry-Perot type interferometric method that permits the concurrent measurement of the thermooptic coefficients of quartz retardation plates in the thermal range 25°-300 °C.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Salvador Bosch, "Simple graphical method for single layer ellipsometry data analysis", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 198390 (23 July 1993); doi: 10.1117/12.2308743; https://doi.org/10.1117/12.2308743
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