23 July 1993 Detection and characterization of local defects on polished glass surfaces using differential interference contraste microscopy
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983AN (1993) https://doi.org/10.1117/12.2308802
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
In this paper we present a new approach for surface profilometry by means of spectral modulation. By spectral modulation we mean the spectral filtering of a light beam in order to store depth information of the surface under test ( 1 ). The surface under test acts as one of the mirrors of a Michelson interferometer. A spectroscopic device is placed at the input of the interferometer, so that each mirror is illuminated by a continuous spectrum when an appropiate light source - a super luminiscent laser diode or a high pressure Xe lamp - is used.The fringe pattern is recorded by a CCD-TV camera.
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T. J. Reschke, T. J. Reschke, } "Detection and characterization of local defects on polished glass surfaces using differential interference contraste microscopy", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AN (23 July 1993); doi: 10.1117/12.2308802; https://doi.org/10.1117/12.2308802
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