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A laser measurement system for measuring parallelism and perpendicularity of large workpieces is discussed. A set of datum planes parallel or perpendicular to each other are established. Deviations from the datum plane are measured by a CCD detector. The experimental result shows that the accuracy is 4 ppm for large workpiece size 5x8 meters.
J. Gerber
"3D-shape measuring system using projected fringes", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AV (23 July 1993); https://doi.org/10.1117/12.2308810
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J. Gerber, "3D-shape measuring system using projected fringes," Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AV (23 July 1993); https://doi.org/10.1117/12.2308810