23 July 1993 Point to point scanning magnetic disk surface profilometer
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983AX (1993) https://doi.org/10.1117/12.2308812
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
A novel method of an optical heterodyne processing system is presented which allows us to take out small irregularities in optical thickness of an uncoated substrate for a compact disk. By use of this method the phase of light which passes through the substrate disk can be extracted with a high precision (±0.02 rad). The irregularities are measured over all the substrate disk and processed to give their statistical parameters, such as probability density function, variance, and auto-correlation function.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mang Cao, "Point to point scanning magnetic disk surface profilometer", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AX (23 July 1993); doi: 10.1117/12.2308812; https://doi.org/10.1117/12.2308812
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