23 July 1993 Point to point scanning magnetic disk surface profilometer
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983AX (1993) https://doi.org/10.1117/12.2308812
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
A novel method of an optical heterodyne processing system is presented which allows us to take out small irregularities in optical thickness of an uncoated substrate for a compact disk. By use of this method the phase of light which passes through the substrate disk can be extracted with a high precision (±0.02 rad). The irregularities are measured over all the substrate disk and processed to give their statistical parameters, such as probability density function, variance, and auto-correlation function.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mang Cao, Mang Cao, } "Point to point scanning magnetic disk surface profilometer", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AX (23 July 1993); doi: 10.1117/12.2308812; https://doi.org/10.1117/12.2308812
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