23 July 1993 Quantitative wavefront measurement using a ronchi test with a phase-shifted sinusoidal grating
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983B5 (1993) https://doi.org/10.1117/12.2308820
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
Elastic scattering of light reflects an inhomogeneous interface between two media. Applied to surfaces the technique is sensitive to roughness levels in the sub-Angstrom region. This makes it an excellent tool for studying minute changes in the surface structure while processing materials. Examples are given of real-time total integrated scattering applied to stress analysis of metallization films and monitoring of thermal stability of silicides.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kenichi Hibino, "Quantitative wavefront measurement using a ronchi test with a phase-shifted sinusoidal grating", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983B5 (23 July 1993); doi: 10.1117/12.2308820; https://doi.org/10.1117/12.2308820
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