23 July 1993 FMCW absolute distance measurement by using external-cavity semiconductor laser
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983BC (1993) https://doi.org/10.1117/12.2308827
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
The optical system of a He-Cd laser based, scanning laser pattern generator (SLPG) is described together with some design principles. The reticle to be exposed is moved on a X-Y air cushion bed, and the computer controlled system is capable to expose reticles of 100x100 mm size on a 2 µin raster grid in less than 90 minutes.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yougjun Wu, Yougjun Wu, } "FMCW absolute distance measurement by using external-cavity semiconductor laser", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983BC (23 July 1993); doi: 10.1117/12.2308827; https://doi.org/10.1117/12.2308827
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