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We discuss the design and estimated accuracy of a multi-axis Michelson-type heterodyne interferometer system with the following main technical data: nominal system resolution 1.25nm, measuring distance 20m, maximum sampling rate 60kHz. We show that the accuracy associated with the data acquisition system is better than ±10nm+0.1ppm within the velocity range of ±1.8m/s and acceleration range of ±9900 m/s2 . Effects of the optical frequency cross talk due to non ideal beam separation, which limits the measurement accuracy are considered.
A. Czitrovszky
"Performance of the new type of general purpose airborne particle counter designed and developed in KFKI", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983BK (23 July 1993); https://doi.org/10.1117/12.2308835
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A. Czitrovszky, "Performance of the new type of general purpose airborne particle counter designed and developed in KFKI," Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983BK (23 July 1993); https://doi.org/10.1117/12.2308835