23 July 1993 Performance of the new type of general purpose airborne particle counter designed and developed in KFKI
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983BK (1993) https://doi.org/10.1117/12.2308835
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
We discuss the design and estimated accuracy of a multi-axis Michelson-type heterodyne interferometer system with the following main technical data: nominal system resolution 1.25nm, measuring distance 20m, maximum sampling rate 60kHz. We show that the accuracy associated with the data acquisition system is better than ±10nm+0.1ppm within the velocity range of ±1.8m/s and acceleration range of ±9900 m/s2 . Effects of the optical frequency cross talk due to non ideal beam separation, which limits the measurement accuracy are considered.
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A. Czitrovszky, "Performance of the new type of general purpose airborne particle counter designed and developed in KFKI", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983BK (23 July 1993); doi: 10.1117/12.2308835; https://doi.org/10.1117/12.2308835
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