23 July 1993 A new thermoplastic holographic camera
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Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983BS (1993) https://doi.org/10.1117/12.2308843
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
An optical heterodyne prof ilometer system for surface roughness measurement in industry environment is presented. Common path system was employed to eliminate the influence of sample vibration. The effect of mechanical instability and frequency drift is also eliminated. The vertical resolution is 0.4 nm. The lateral resolution is 1.5 um. The accuracy is 4 nm.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Carreno, F. Carreno, } "A new thermoplastic holographic camera", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983BS (23 July 1993); doi: 10.1117/12.2308843; https://doi.org/10.1117/12.2308843
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