23 July 1993 Heterodyne interferometry with Brillouin waves
Author Affiliations +
Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983CB (1993) https://doi.org/10.1117/12.2308862
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary
Abstract
There are many branches of high technologes (such as optoelectronics and semiconductory), which widely use methods of operational or finish nondestructive inspection. Laser scanning microscoping (LSM) is one of such optical methods. LSM gives us unique information about properties and quality of materials and structures in photometrical and OBIC (optical beam induced current) modes. In this paper the possibilities of inspection by original LSM-device RASTR-2M were illustrated. The objects of investigation were solid semiconductor materials and photosensor structures (photodetectores and sun batteries).
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Juergen Czarske, Juergen Czarske, } "Heterodyne interferometry with Brillouin waves", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983CB (23 July 1993); doi: 10.1117/12.2308862; https://doi.org/10.1117/12.2308862
PROCEEDINGS
2 PAGES


SHARE
Back to Top