Multiwavelength ellipsometry at strained Si1-xGex layers on Si substrate

Marita Weidner; Michael Eichler; Peter Paduschek

doi:10.1117/12.162769

19 November 1993 Multiwavelength ellipsometry at strained Si_1-xGe_x layers on Si substrate

Marita Weidner, Michael Eichler, Peter Paduschek

Proceedings Volume 1985, Physical Concepts and Materials for Novel Optoelectronic Device Applications II; (1993) https://doi.org/10.1117/12.162769
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications II, 1993, Trieste, Italy

Abstract

Rapid characterization of thin epitaxial Si_1-xGe_x layers on silicon substrate was made by multi-wavelength ellipsometry. Si_1-xGe layers were deposited by chemical vapor deposition in an atmospheric pressure reactor at 700 degree(s)C. A thickness variation of these strained thin layers (20 to 80 nm) was generated for different germanium contents in the range of 0.10 < X < 0.22. For ellipsometrical measurements a PLASMOS-ellipsometer SD 2000 at an incident angle of 70 degree(s) at different wavelengths was used. Theoretical simulations for measured ellipsometrical angles (Psi) and (Delta) and an iteration procedure were achieved to estimate the refractive index and thickness of Si_1-xGe_x layers on silicon substrate. The compositions are obtained by x-ray double crystal diffractometry to provide a correlation to ellipsometrical measurements. Stress in the thin layers is determined by Raman line shift. We found a relation between the real part of the refractive index of Si_1-xGe_x layers and the Ge-content in these layers at the wavelengths of 632.8 nm and 785 nm.

Citation Download Citation

Marita Weidner, Michael Eichler, and Peter Paduschek "Multiwavelength ellipsometry at strained Si_1-xGe_x layers on Si substrate", Proc. SPIE 1985, Physical Concepts and Materials for Novel Optoelectronic Device Applications II, (19 November 1993); https://doi.org/10.1117/12.162769

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available