Thin polyimide films prepared by a vacuum deposition process (VDP): morphology and properties

Gentsho V. Danev; Erintche M. Spassova; Dimitre Z. Dimitrov; Ivo P. Doudevski

doi:10.1117/12.162734

19 November 1993 Thin polyimide films prepared by a vacuum deposition process (VDP): morphology and properties

Gentsho V. Danev, Erintche M. Spassova, Dimitre Z. Dimitrov, Ivo P. Doudevski

Proceedings Volume 1985, Physical Concepts and Materials for Novel Optoelectronic Device Applications II; (1993) https://doi.org/10.1117/12.162734
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications II, 1993, Trieste, Italy

Abstract

Thin polyimide films, prepared by vacuum deposition, have been investigated. The influence of the nature of the monomers, evaporation rate, treatment of the substrate and post- preparation treatment (imidization) of the layers on the structure are discussed. Infrared spectra and thermogravimetric analysis results are consistent with the interpretation that VDP films produced are polyamic acid curable to polyimide. The morphology and properties have been characterized by electron microscopy.

Citation Download Citation

Gentsho V. Danev, Erintche M. Spassova, Dimitre Z. Dimitrov, and Ivo P. Doudevski "Thin polyimide films prepared by a vacuum deposition process (VDP): morphology and properties", Proc. SPIE 1985, Physical Concepts and Materials for Novel Optoelectronic Device Applications II, (19 November 1993); https://doi.org/10.1117/12.162734

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