29 December 1993 Acousto-optic scanning system for a large-size mask plotter
Author Affiliations +
Abstract
A two-beam laser scanning system using an acousto-optic deflector (AOD) has been developed. The lensing effect and the AOD nonlinearity were investigated, and were completely compensated for. In order to write a variety of masks, a servomotor-based auto- focus and an auto-revolver with up to three objective lenses were adopted.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eiichi Tamaki, Eiichi Tamaki, } "Acousto-optic scanning system for a large-size mask plotter", Proc. SPIE 1987, Recording Systems: High-Resolution Cameras and Recording Devices and Laser Scanning and Recording Systems, (29 December 1993); doi: 10.1117/12.165203; https://doi.org/10.1117/12.165203
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT


Back to Top