31 October 1994 Convolution formulation of diffraction for grating system
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Proceedings Volume 1991, Diffractometry and Scatterometry; (1994) https://doi.org/10.1117/12.192045
Event: International Conference on Diffractometry and Scatterometry, 1994, Warszawa, Poland
Abstract
The convolution method of solution of some problems in scalar diffraction for optical multicomponent systems including ones based on the Talbot or Lau effect is described. This work is a development of ideas of the diffraction theory treatment suggested by Cowlew and Hoodie. As example, the developed method has been applied to a double- grating system for which three configurations are found and investigated.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander P. Smirnov, Alexander P. Smirnov, } "Convolution formulation of diffraction for grating system", Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); doi: 10.1117/12.192045; https://doi.org/10.1117/12.192045
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